Unlike the electron beam used in scanning and transmission electron microscopy (SEM, TEM), the beam in a focused ion beam system (FIB) is composed of gallium (Ga) ions. The ions forming the structure ...
A technique used on older process nodes is providing even more valuable benefits as IC designers work on devices that will be manufactured at advanced technology nodes including 28 nm and beyond. Now ...
In this interview, AZoM speaks to Dr. Dean Miller, Senior Scientist at TESCAN Group, about how plasma FIB-SEM can be used to accelerate multi-modal materials characterization. FIB-SEM is based on a ...
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